MSE 225 – Thin Film Science and Technology

Course Number: MSE 225C
Course Units: 3

Instructor: Professor J. Wu

Course Description: This course provides an introduction to the preparation methods, characterization techniques, and the physical properties of thin films. Topics covered include: gas kinetics, vacuum science and technology, thin film deposition techniques, growth process and modes, thin film processing, characterization, epitaxy, lattice engineering, metastable phases, artificial structures, mechanical, electrical, magnetic and optical properties of films, and processing-microstructure-property-performance relationships in the context of applications in information storage, integrated circuits, micro-electromechanical systems, optoelectronics and photovoltaics.

Prerequisites: Graduate standing in engineering, physics, chemistry, or chemical engineering, or consent of the instructor.

Course Format: Three hours of lecture per week.