MSE 125 – Thin-film Materials Science

Course Number: MSE 125
Course Units: 3
Instructor  Oscar Dubon

Course Description

Deposition, processing, and characterization of thin films and their technological applications. Physical and chemical vapor deposition methods. Thin-film nucleation and growth. Thermal and ion processing. Microstructural development in epitaxial, polycrystalline, and amorphous films. Thin-film characterization techniques. Applications in information storage, integrated circuits, and optoelectronic devices. Laboratory demonstrations. (SP)


Upper division or graduate standing in engineering, physics, chemistry, and chemical engineering; Engineering 45 required; 111 or Physics 141A recommended.

Course Format

Three hours of lecture per week.